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C Target

APG

Metal Target

Graphite Target (C)

High Purity
Excellent Electrical Conductivity
High Thermal Stability

Product Introduction

Engineered from high-purity graphite, the graphite targets exhibit exceptional thermal stability, superior heat resistance, and a low coefficient of thermal expansion. These targets are critical for depositing high-performance carbon films in sectors such as semiconductors, photovoltaics, and advanced battery materials, where maintaining material integrity during high-temperature processing is paramount.

Outstanding Features of Graphite Target

  • High Thermal Stability

    It maintains stable performance in high-power, high-temperature sputtering processes, ensuring uniform film deposition.

  • Low Thermal Expansion Coefficient

    It is dimensionally stable under temperature changes, reducing deposition stress and enhancing the film's density and adhesion.

  • Excellent Electrical Conductivity

    Graphite targets have good electrical conductivity, making them suitable for the preparation of electronic devices, functional films, and conductive layers.


Wide Applications of Graphite Target

  1. Semiconductor Manufacturing

    Graphite targets are used for preparing conductive films, carbon barrier layers, and interconnect layers, ensuring high performance and stability of devices.

  2. Optical Component Manufacturing

    Used for preparing carbon films, anti-reflection coatings, and infrared absorption films, widely applied in optical components, laser devices, and infrared windows.

  3. Photovoltaic Industry

    Used in photovoltaic cell back electrodes, fuel cell carbon layers, and supercapacitor conductive layers, enhancing energy conversion efficiency and device lifespan.

  4. Aerospace

    Films deposited by graphite targets can serve as high-temperature protective coatings, improving heat resistance and wear resistance.


Technical characteristics

  • Purity

    Purity

    99.99%

  • Relative density

    Relative density

    ≥99%

Application scenarios

  • Semiconductor Manufacturing

    Semiconductor Manufacturing

  • Optical Device Manufacturing

    Optical Device Manufacturing

  • Photovoltaic Industry

    Photovoltaic Industry

  • Aerospace

    Aerospace

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